Method | FOV | Spatial resolution | Energy | Sample thickness |
---|---|---|---|---|
Micro-XCT | 0.5–50 mm | 30–0.7 μm | 30–160 kV | 0.5–70 mm |
Laboratory nano-XCT | 10–100 µm | 30–100 nm | 5–20 keV | 50 µm–10 mm |
Synchrotron radiation nano-XCT | 5–100 µm | 10–100 nm | 0.1–20 keV | 1 µm–10 mm |
ET/TEM | < 1–10 µm | < 1 Å | 1 keV–1 MeV | < 150 nm |